ACCELEROMETERS

Accelerometers consist of a micro machined silicon mass suspended
by mulitple beams from a silicon frame. Piezoresistors located in
the beams change their resistance as the motion of the suspended mass changes
the strain in the beams. Silicon caps on the top and bottom of the
accelerometers are added to provide over-range stops. Th accelerometer
design provides for a low profile, high shock resistance, durability
and built-in damping over a wide usable bandwidth.